A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens
	Tao, Xing; Wang, Changtao; Zhao, Zeyu; Wang, Yanqin; Yao, Na; Luo, Xiangang
刊名	Applied Physics B: Lasers and Optics
	2014
卷号	114 期号:4 页码:545-550
ISSN号	09462171
通讯作者	Luo, X. (lxg@ioe.ac.cn)
中文摘要	Metamaterial composed of multistacked metal and dielectric films provides the access to ray tracing in subwavelength regions and to form a variety of transformation optical devices for manipulating light beyond the diffraction limit, such as hyperlens and cloak. In this paper, this method is employed to design planar hyperlens for demagnification imaging lithography. Variant ray route configurations are considered and compared for the sake of imaging quality as well as device structure complexity. It is found that specifically designed trajectory route from the object plane to the image plane help to yield imaging devices with uniform demagnification ratio and improved image quality. Then multiple similar imaging devices could be cascaded for further demagnification and reduce of structure complexity from the viewpoint of application. The imaging results with about 1/23 wavelength (16 nm) half-pitch resolution in the measure of electric field intensity are demonstrated with numerical simulations. Also presented are the imaging characteristic analyses including light intensity, demagnification ratio and resolution. © 2013 Springer-Verlag Berlin Heidelberg.
英文摘要	Metamaterial composed of multistacked metal and dielectric films provides the access to ray tracing in subwavelength regions and to form a variety of transformation optical devices for manipulating light beyond the diffraction limit, such as hyperlens and cloak. In this paper, this method is employed to design planar hyperlens for demagnification imaging lithography. Variant ray route configurations are considered and compared for the sake of imaging quality as well as device structure complexity. It is found that specifically designed trajectory route from the object plane to the image plane help to yield imaging devices with uniform demagnification ratio and improved image quality. Then multiple similar imaging devices could be cascaded for further demagnification and reduce of structure complexity from the viewpoint of application. The imaging results with about 1/23 wavelength (16 nm) half-pitch resolution in the measure of electric field intensity are demonstrated with numerical simulations. Also presented are the imaging characteristic analyses including light intensity, demagnification ratio and resolution. © 2013 Springer-Verlag Berlin Heidelberg.
学科主题	Dielectric films - Electric field measurement - Electric fields - Image quality - Imaging techniques
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000332852200013
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/6852]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
推荐引用方式 GB/T 7714	Tao, Xing,Wang, Changtao,Zhao, Zeyu,et al. A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens[J]. Applied Physics B: Lasers and Optics,2014,114(4):545-550.
APA	Tao, Xing,Wang, Changtao,Zhao, Zeyu,Wang, Yanqin,Yao, Na,&Luo, Xiangang.(2014).A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens.Applied Physics B: Lasers and Optics,114(4),545-550.
MLA	Tao, Xing,et al."A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens".Applied Physics B: Lasers and Optics 114.4(2014):545-550.