A bi-directional out-of-plane actuator by electrostatic force

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	A bi-directional out-of-plane actuator by electrostatic force
	Ren, Hao 1; Wang, Weimin 2; Tao, Fenggang 2; Yao, Jun 2
刊名	Micromachines
	2013
卷号	4 期号:4 页码:431-443
通讯作者	Yao, J. (junyao@ioe.ac.cn)
中文摘要	Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland.
英文摘要	Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland.
学科主题	Actuators - Adaptive optics - Electrostatic force - MEMS - Microfabrication
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000329707400006
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/6832]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.School of Electrical Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, United States 2.State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
推荐引用方式 GB/T 7714	Ren, Hao,Wang, Weimin,Tao, Fenggang,et al. A bi-directional out-of-plane actuator by electrostatic force[J]. Micromachines,2013,4(4):431-443.
APA	Ren, Hao,Wang, Weimin,Tao, Fenggang,&Yao, Jun.(2013).A bi-directional out-of-plane actuator by electrostatic force.Micromachines,4(4),431-443.
MLA	Ren, Hao,et al."A bi-directional out-of-plane actuator by electrostatic force".Micromachines 4.4(2013):431-443.