Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry

	Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry
	Li Jiang ; Li Pei ; Huang Feng ; Wei Xianhua ; Ge Fangfang ; Li Peng
刊名	Acta Optica Sinica
	2015
卷号	35 期号:4
中文摘要	采用光谱型椭偏仪(SE)和分光光度计分别测量了超薄类金刚石(DLC)薄膜和非晶硅(a-Si)薄膜的椭偏参数(psi 和△)和透射率T
公开日期	2016-09-18
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/12774]
专题	宁波材料技术与工程研究所_2015专题
推荐引用方式 GB/T 7714	Li Jiang,Li Pei,Huang Feng,et al. Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry[J]. Acta Optica Sinica,2015,35(4).
APA	Li Jiang,Li Pei,Huang Feng,Wei Xianhua,Ge Fangfang,&Li Peng.(2015).Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry.Acta Optica Sinica,35(4).
MLA	Li Jiang,et al."Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry".Acta Optica Sinica 35.4(2015).