System error removal and structure optimization based on Fizeau interferometer

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 高功率激光物理国家实验室

	System error removal and structure optimization based on Fizeau interferometer
	Cao Xiaojun ; Zhu JQ(朱健强) ; Li Yanhong ; Lin Qiang
刊名	optik
	2007
卷号	118 期号:10 页码:495
关键词	fizeau interferometer measurement error phase distribution wavefront error
ISSN号	0030-4026
中文摘要	in the process of interferometric testing, the measurement result is influenced by the system structure, which reduces the measurement accuracy. to obtain an accurate test result, it is necessary to analyze the test system, and build the relationship between the measurement error and the system parameters. in this paper, the influences of the system elements which include the collimated lens and the standard surface on the interferometric testing are analyzed, the expressions of phase distribution and wavefront error on the detector are obtained, the method to remove some element errors is introduced, and the optimization structure relationships are given. (c) 2006 elsevier gmbh. all rights reserved.
收录类别	EI
语种	英语
WOS记录号	WOS:000250336300006
公开日期	2009-09-18
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/3116]
专题	上海光学精密机械研究所_高功率激光物理国家实验室
推荐引用方式 GB/T 7714	Cao Xiaojun,Zhu JQ,Li Yanhong,et al. System error removal and structure optimization based on Fizeau interferometer[J]. optik,2007,118(10):495, 501.
APA	Cao Xiaojun,朱健强,Li Yanhong,&Lin Qiang.(2007).System error removal and structure optimization based on Fizeau interferometer.optik,118(10),495.
MLA	Cao Xiaojun,et al."System error removal and structure optimization based on Fizeau interferometer".optik 118.10(2007):495.