High-fidelity replication of Dammann gratings using soft lithography

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学开放实验室

	High-fidelity replication of Dammann gratings using soft lithography
	Wang Wei ; Zhou CH(周常河) ; Jia Wei
刊名	appl. optics
	2008
卷号	47 期号:10 页码:1427
关键词	Dammann gratings Diffraction imaging Grating structures High throughputs High-fidelity Light intensities Low costs Optical performances Soft-lithography Surface reliefs UV-curable
ISSN号	0003-6935
中文摘要	we report the experimental results of using the soft lithography method for replication of dammann gratings. by using an elastomeric stamp, uniform grating structures were transferred to the ltv-curable polymer. to evaluate the quality of the replication, diffraction images and light intensity were measured. compared with the master devices, the replicas of dammann gratings show a slight deviation in both surface relief profile and optical performance. experimental results demonstrated that high-fidelity replication of dammann gratings is realized by using soft lithography with low cost and high throughput. (c) 2008 optical society of america.
收录类别	EI
语种	英语
WOS记录号	WOS:000255345400025
公开日期	2009-09-18
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/2314]
专题	上海光学精密机械研究所_信息光学开放实验室
推荐引用方式 GB/T 7714	Wang Wei,Zhou CH,Jia Wei. High-fidelity replication of Dammann gratings using soft lithography[J]. appl. optics,2008,47(10):1427, 1429.
APA	Wang Wei,周常河,&Jia Wei.(2008).High-fidelity replication of Dammann gratings using soft lithography.appl. optics,47(10),1427.
MLA	Wang Wei,et al."High-fidelity replication of Dammann gratings using soft lithography".appl. optics 47.10(2008):1427.