Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature

	Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature
	Ma, YH; Liu, FZ; Zhu, MF; Liu, JL; Wang, HH; Yang, Y; Li, YF; Wang HH(王焕华)
刊名	NANOTECHNOLOGY
	2009
卷号	20 期号:27 页码:275201
通讯作者	[Ma, Yanhong ; Liu, Fengzhen ; Zhu, Meifang ; Liu, Jinlong] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China ; [Wang, Huan-hua] Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China ; [Yang, Yi ; Li, Yongfang] Chinese Acad Sci, Inst Chem, Beijing 100190, Peoples R China
英文摘要	Aligned amorphous and crystallized silicon nanorods (SiNRs) were successfully fabricated at low temperatures using radio frequency magnetron sputtering and hot wire chemical vapor deposition with glancing angle incident flux. The influences of the deposition pressure, sputtering power, substrate rotation and hydrogen dilution ratio on the diameter, density, orientation and crystallization of the Si nanorods were systematically investigated. With increasing sputtering power, the density of Si nanorods decreases and the diameter of SiNRs increases. The pressure has the opposite effect on the growth of SiNRs compared with the sputtering power. By combining glancing angle deposition ( GLAD) with the hydrogen diluted silane in hot wire chemical vapor deposition (HWCVD), aligned crystallized Si nanorods with a crystalline volume fraction of 0.55 were achieved under a substrate temperature of 140 degrees C. The Si nanorods have been tested for photovoltaic application.
学科主题	Science & Technology - Other Topics; Materials Science; Physics
类目[WOS]	Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]	Science & Technology - Other Topics ; Materials Science ; Physics
原文出处	SCI
语种	英语
WOS记录号	WOS:000267089600003
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/241056]
专题	高能物理研究所_多学科研究中心
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Ma, YH,Liu, FZ,Zhu, MF,et al. Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature[J]. NANOTECHNOLOGY,2009,20(27):275201.
APA	Ma, YH.,Liu, FZ.,Zhu, MF.,Liu, JL.,Wang, HH.,...&王焕华.(2009).Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature.NANOTECHNOLOGY,20(27),275201.
MLA	Ma, YH,et al."Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature".NANOTECHNOLOGY 20.27(2009):275201.