Fabrication of the beam splitters for soft X-ray laser application

	Fabrication of the beam splitters for soft X-ray laser application
	Wang, ZS; Wu, YG; Tang, WX; Qin, SJ; Chen, LY; Xu, XD; Hong, YL; Fu, SJ; Zhu, J; Cui, MQ
刊名	CHINESE SCIENCE BULLETIN
	2003
卷号	48 期号:18 页码:1930-1933
关键词	soft X-ray beam splitter multilayer interference
通讯作者	Tongji Univ, Inst Precis Opt Engn, Dept Phys, Shanghai 200092, Peoples R China ; Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China ; Inst High Energy Phys, Beijing 100039, Peoples R China
英文摘要	The soft X-ray interferometry is completed by the Mach-Zehnder interferometer using a soft X-ray laser, and it is also an important method to measure the electron densities of a laser-produced plasma near the critical surface. It is apparently demonstrated in this paper that the incident angle of each optical element in the soft X-ray Mach-Zehnder interferometer should be near normal incidence based on the polarized characteristics of the soft X-ray multilayers, and the product of reflectivity and transmission of the beam splitter should be taken as a standard of design according to the structure of the soft X-ray Mach-Zehnder interferometer. The beam splitters used in the soft X-ray interferometry at 13.9 nm are fabricated using the ion beam sputtering. The figure error of the beam splitter has reached the nanometer magnitude, in which the product of reflectivity and transmission of the beam splitter is more than 1.6%.
学科主题	Science & Technology - Other Topics
类目[WOS]	Multidisciplinary Sciences
研究领域[WOS]	Science & Technology - Other Topics
原文出处	SCI
语种	英语
WOS记录号	WOS:000185748100006
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/239585]
专题	高能物理研究所_多学科研究中心
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Wang, ZS,Wu, YG,Tang, WX,et al. Fabrication of the beam splitters for soft X-ray laser application[J]. CHINESE SCIENCE BULLETIN,2003,48(18):1930-1933.
APA	Wang, ZS.,Wu, YG.,Tang, WX.,Qin, SJ.,Chen, LY.,...&崔明启.(2003).Fabrication of the beam splitters for soft X-ray laser application.CHINESE SCIENCE BULLETIN,48(18),1930-1933.
MLA	Wang, ZS,et al."Fabrication of the beam splitters for soft X-ray laser application".CHINESE SCIENCE BULLETIN 48.18(2003):1930-1933.