基于低速面阵CCD的正弦相位调制干涉测量
何国田 ; 王向朝 ; 唐锋
刊名中国激光
2007
卷号34期号:2页码:265
关键词测量 干涉 正弦相位调制 低速CCD表面形貌检测 measurement interferometry sinusoidal phase modulating low speed CCD surface profile measurement
ISSN号0258-7025
其他题名Sinusoidal Phase Modulating Interferometry Based on Low Frame Rate Area Array CCD
中文摘要正弦相位调制(SPM)干涉测量技术用于表面形貌测量时, 需要帧速高于300 frame/s的图像传感器, 同时要求调制信号频率与图像传感器帧速成确定的整数倍关系。提出一种基于低速CCD(30 frame/s)的帧速可调的高速图像传感技术, 通过控制每帧像素总数提高CCD帧速, 研制出一种高帧速图像传感器, 帧速可达300~1600 frame/s, 且每帧大小连续可调。将该CCD传感器用于正弦相位调制干涉泰曼-格林干涉仪, 测量镀膜玻璃板表面形貌, 当CCD图像传感器的帧速与调制信号频率呈16, 8, 4; In the sinusoidal phase modulating (SPM) interferometer technology for surface profile measurement, the high speed charge coupled device (CCD) of frame frequency greater than 300 frame/s is necessary to detect the interference signals, and the relationship between CCD′s frame frequency and modulating frequency is needed to be integer multiple. A novel high-speed image sensing technique with adjustable frame rate based on an low speed CCD(frame frequency less than 30 frame/s) was proposed in this paper, which can be used to realize the surface profile measurement by the SPM interferometer. A high speed sensor was designed by controlling the number of pixels of every frame to improve the CCD frame rate, the frame rate is in the range of 300~1600 frame/s, and the frame size can continuously adjustable, which satisfies the sinusoidal phase modulation. The SPM interferometer with the CCD was used to measure the surface profile of glass plate, and the experiment results of the measurement accuracy under different frame rates were compared. When the frame rates are 16, 8, 4 times of the modulating signal, arithmetical mean deviation of the glass plate surface profile is less than 1.8 nm, and repeatability of the accuracy is superior to 3 nm.
分类号TH744.3;TP212;TN247
收录类别ei
语种中文
公开日期2009-09-18
内容类型期刊论文
源URL[http://ir.siom.ac.cn/handle/181231/2238]  
专题上海光学精密机械研究所_信息光学开放实验室
推荐引用方式
GB/T 7714
何国田,王向朝,唐锋. 基于低速面阵CCD的正弦相位调制干涉测量[J]. 中国激光,2007,34(2):265, 271.
APA 何国田,王向朝,&唐锋.(2007).基于低速面阵CCD的正弦相位调制干涉测量.中国激光,34(2),265.
MLA 何国田,et al."基于低速面阵CCD的正弦相位调制干涉测量".中国激光 34.2(2007):265.
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace