Insight into Al existing form and its role on microstructure and properties of Cr1-xAlxN films | |
Fu YY(付英英)1,2; Li HX(李红轩)1; Ji L(吉利)1; Liu XH(刘晓红)1; Liu L(刘流)3; Zhou HD(周惠娣)1; Chen JM(陈建敏)1 | |
刊名 | Surface and Interface Analysis |
2016 | |
卷号 | 48期号:1页码:26-33 |
关键词 | Cr1-xAlxN films Al contents microstructure thermal stability tribological properties |
ISSN号 | 0142-2421 |
通讯作者 | 吉利 ; 陈建敏 |
英文摘要 | A series of Cr1−xAlxN (where x denotes the atom fraction of Al in Cr1−xAlxN film) films with different Al contents have been deposited by unbalanced reactive magnetron sputtering technique. The chemical composition, microstructure, surface morphology, cross-sectional structure, mechanical properties, thermal stability and tribological properties of the deposited films were studied by means of different techniques. It is found that with the increase of Al doping, the Al atoms either substitute the Cr atoms or occupy the interstitial sites in the CrN crystal lattice firstly, and when the Al doping content exceeds the solid solubility, superfluous Al atoms then exist in the form of amorphous or nanocrystal state in the films. Meanwhile, the grain size becomes smaller, and the microstructure gets denser because the Al doping leads to multiple crystal orientations and inhibits the grain growth. The Al doping induced solid solution hardening and grain boundary effects contribute to the high hardness of CrAlN films, and the dense structure as well as interstitial solid solution of Al, which can block the diffusion channel, endows the CrAlN films good oxidation resistance. Besides, a small amount of free Al existing in the films is favorable to improve the thermal stability without obvious loss of hardness. Finally, the relatively high hardness and good thermal stability make the Cr0.29Al0.71N film has relatively good tribological properties than CrN film under a wide temperature range, which extends the operating temperature of the CrN films in some fields. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the Ministry of Science and Technology of China (in the name of National '973' plan, grant no. 2013CB 632302);the National Natural Science Foundation of China (grant no. 51175491;51505461) |
语种 | 英语 |
WOS记录号 | WOS:000369500800005 |
内容类型 | 期刊论文 |
源URL | [http://210.77.64.217/handle/362003/19718] |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Tianshui Normal Univ, Sch Life Sci Chem, Tianshui 741000, Peoples R China |
推荐引用方式 GB/T 7714 | Fu YY,Li HX,Ji L,et al. Insight into Al existing form and its role on microstructure and properties of Cr1-xAlxN films[J]. Surface and Interface Analysis,2016,48(1):26-33. |
APA | Fu YY.,Li HX.,Ji L.,Liu XH.,Liu L.,...&Chen JM.(2016).Insight into Al existing form and its role on microstructure and properties of Cr1-xAlxN films.Surface and Interface Analysis,48(1),26-33. |
MLA | Fu YY,et al."Insight into Al existing form and its role on microstructure and properties of Cr1-xAlxN films".Surface and Interface Analysis 48.1(2016):26-33. |
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