一种新的光刻机像质参数热漂移检测技术

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学开放实验室

	一种新的光刻机像质参数热漂移检测技术; A Novel Technique for Measuring the Thermal Drifts of Imaging Parameters of Lithographic Tools
	张冬青 ; 王向朝 ; 施伟杰 ; 马明英 ; 王帆
刊名	中国激光
	2005
卷号	32 期号:12 页码:1668
关键词	测量 measurement 最佳焦面热漂移 thermal drift of best focus 放大倍率热漂移 thermal drift of magnification 投影物镜 projection lens 光刻机 lithographic tool 原位检测 in-situ measurement
ISSN号	0258-7025
其他题名	A Novel Technique for Measuring the Thermal Drifts of Imaging Parameters of Lithographic Tools
中文摘要	提出了一种新的光刻机像质参数热漂移原位检测技术（TDFM）。详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。实验结果表明TDFM技术可同时实现最佳焦面热漂移（FFT）与放大倍率热漂移（MFT）的精确测量。与现有的放大倍率热漂移检测技术相比，该技术有效地解决了放大倍率热漂移技术中放大倍率热漂移受最佳焦面热漂移影响的问题，简化了光刻机像质参数前馈校正的测试过程，测试成本与耗时均减少50％。; During the exposure of lithography tools, the performance of the projection lens is shown to be dependent on the amount of the energy absorbed. A novel technique for measuring the thermal drifts of imaging parameters of the lithographic projection systems is proposed. The principle for measuring the thermal drifts of focus and magnification (TDFM) based on mirror-symmetry marks is described in this paper. Through experiments, it is demonstrated that thermal drifts of best focus and magnification of the projection systems can be obtained with high accuracy by the technique. Compared to magnification fine tune (MFT), the conventional technique used for thermal drift measurement of magnification, TDFM has the advantages of considering the influences of the process factors on the lateral displacements and decreasing the time of thermal drifts measurement. The cost and the time of thermal drifts measurement are both decreased by 50%.
分类号	TN305.7
收录类别	ei
语种	中文
公开日期	2009-09-18
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/2084]
专题	上海光学精密机械研究所_信息光学开放实验室
推荐引用方式 GB/T 7714	张冬青,王向朝,施伟杰,等. 一种新的光刻机像质参数热漂移检测技术, A Novel Technique for Measuring the Thermal Drifts of Imaging Parameters of Lithographic Tools[J]. 中国激光,2005,32(12):1668, 1672.
APA	张冬青,王向朝,施伟杰,马明英,&王帆.(2005).一种新的光刻机像质参数热漂移检测技术.中国激光,32(12),1668.
MLA	张冬青,et al."一种新的光刻机像质参数热漂移检测技术".中国激光 32.12(2005):1668.