Electric field induced fabrication of nano dots, lines and pits with AFM

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Electric field induced fabrication of nano dots, lines and pits with AFM
	Li DH(李登辉); Liu ZL(刘增磊); Zhang, Ying; Jiao ND(焦念东); Liu LQ(刘连庆)
	2015
会议名称	2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议日期	June 8-12, 2015
会议地点	Shenyang, China
关键词	Nanomanipulation nanodeposition atomic force microscope electric field field emission
页码	1143-1148
中文摘要	This paper researched the electric field induced fabrication with atomic force microscope (AFM). Current-induced deposition rather than voltage-induced deposition is introduced. With this method, nano dots, lines and pits can be fabricated. Especially, the nano lines can be deposited continuously, rather than depositing a row of nano dots to form a nano line. This method is expected to be used as a nano welding technique, which can improve the physical and electrical connections between the various components of nano devices.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议录	2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议录出版者	IEEE
会议录出版地	Piscataway, NJ, USA
语种	英语
ISSN号	2379-7711
ISBN号	978-1-4799-8730-6
WOS记录号	WOS:000380502300212
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/18512]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Li DH,Liu ZL,Zhang, Ying,et al. Electric field induced fabrication of nano dots, lines and pits with AFM[C]. 见:2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER). Shenyang, China. June 8-12, 2015.