Implantation induced defects and electrical properties of Sb-implanted ZnO

	Implantation induced defects and electrical properties of Sb-implanted ZnO
	Hui Xie ; Tong Liu ; JingMing Liu ; KeWei Cao ; ZhiYuan Dong ; Jun Yang ; YouWen Zhao
刊名	science china technological sciences
	2015
卷号	58 期号:8 页码:1333-1338
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2016-03-29
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/26862]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Hui Xie,Tong Liu,JingMing Liu,et al. Implantation induced defects and electrical properties of Sb-implanted ZnO[J]. science china technological sciences,2015,58(8):1333-1338.
APA	Hui Xie.,Tong Liu.,JingMing Liu.,KeWei Cao.,ZhiYuan Dong.,...&YouWen Zhao.(2015).Implantation induced defects and electrical properties of Sb-implanted ZnO.science china technological sciences,58(8),1333-1338.
MLA	Hui Xie,et al."Implantation induced defects and electrical properties of Sb-implanted ZnO".science china technological sciences 58.8(2015):1333-1338.