Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator

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	Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator
	Yan Qingfeng ; Yu Jinahong ; Liu Zhongli
刊名	半导体学报
	2003
卷号	24 期号:2 页码:133-136
中文摘要	an ultracompact 3-db coupler is designed and fabricated in silicon-on-insulator,based on 12 line tapered multimode interference(mmi) coupler.comparing with the conventional straigth mmi coupler,the device is-40% shorter in length.the device exhibits uniformity of 1.3db and excess loss of 2.5db
英文摘要	an ultracompact 3-db coupler is designed and fabricated in silicon-on-insulator,based on 12 line tapered multimode interference(mmi) coupler.comparing with the conventional straigth mmi coupler,the device is-40% shorter in length.the device exhibits uniformity of 1.3db and excess loss of 2.5db; 于2010-11-23批量导入; zhangdi于2010-11-23 13:06:53导入数据到semi-ir的ir; made available in dspace on 2010-11-23t05:06:53z (gmt). no. of bitstreams: 1 4848.pdf: 278452 bytes, checksum: e53ec7008246651101f19ea3afb6281b (md5) previous issue date: 2003; 国家自然科学基金（批准号：6999 54 ，6989626 ）,国家重点基础研究发展规划（编号：g2 366）资助项目; institute of semiconductors,the chinses academy of sicences;microelectronics r&d center,institute of semiconductors,the chinese academy of sciences
学科主题	微电子学
收录类别	CSCD
资助信息	国家自然科学基金（批准号：6999 54 ，6989626 ）,国家重点基础研究发展规划（编号：g2 366）资助项目
语种	英语
公开日期	2010-11-23 ; 2011-04-29
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/17629]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yan Qingfeng,Yu Jinahong,Liu Zhongli. Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator[J]. 半导体学报,2003,24(2):133-136.
APA	Yan Qingfeng,Yu Jinahong,&Liu Zhongli.(2003).Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator.半导体学报,24(2),133-136.
MLA	Yan Qingfeng,et al."Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator".半导体学报 24.2(2003):133-136.