Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene | |
Zhang, Man; Cao, Axiu; Shi, Lifang; Deng, Qiling; Hu, Song | |
刊名 | OPTIK |
2015 | |
卷号 | 126期号:23页码:4123-4126 |
关键词 | Soft-nanoimprint lithography Hybrid mold Thiol-ene PDMS |
ISSN号 | 0030-4026 |
英文摘要 | Soft-nanoimprint lithography is a high-throughput and cost-effective lithographic technique with high resolution and low pressure, of which the crucial component is the mold. We demonstrate a method to fabricate hybrid soft-nanoimprint mold in benign ambient based on UV-curable thiol-ene polymer. Because of the special photopolymerization mechanism via "click chemistry", thiol-ene can be cured completely at ambient conditions without inhabitation from oxygen or moisture. The mold can be fabricated in air not in vacuum or a nitrogen atmosphere to simplify the fabrication process and lower the cost. Based on this method, we fabricated a soft-nanoimprint hybrid mold in benign ambient, which is composed of rigid thiol-ene features with sub-60 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate. (C) 2015 Elsevier GmbH. All rights reserved. |
WOS标题词 | Science & Technology ; Physical Sciences |
类目[WOS] | Optics |
研究领域[WOS] | Optics |
关键词[WOS] | IMPRINT LITHOGRAPHY ; CLICK CHEMISTRY ; POLY(DIMETHYLSILOXANE) ; RESOLUTION ; SURFACE |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000365373400125 |
公开日期 | 2016-02-26 |
内容类型 | 期刊论文 |
源URL | [http://ir.ioe.ac.cn/handle/181551/3768] |
专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
作者单位 | Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
推荐引用方式 GB/T 7714 | Zhang, Man,Cao, Axiu,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene[J]. OPTIK,2015,126(23):4123-4126. |
APA | Zhang, Man,Cao, Axiu,Shi, Lifang,Deng, Qiling,&Hu, Song.(2015).Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene.OPTIK,126(23),4123-4126. |
MLA | Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene".OPTIK 126.23(2015):4123-4126. |
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