| 题名 | 大中型SiC非球面反射镜确定性高效加工工艺的研究 |
| 作者 | 殷龙海 |
| 学位类别 | 博士 |
| 答辩日期 | 2015-05 |
| 授予单位 | 中国科学院大学 |
| 导师 | 张学军,郑立功 |
| 关键词 | 非球面反射镜 SiC 确定性高效加工 超声复合磨削 磁流变抛光 |
| 其他题名 | Large and medium-sized SiC aspherical mirrors deterministic efficient processing technology research |
| 学位专业 | 光学工程 |
| 中文摘要 | 大中型非球面反射镜在地面望远光学系统和空间对地侦查光学系统中广泛应用，需求量日益增加，大中型非球面的加工要求已经从过去的可以加工改变为现在能够快速确定性高效加工。本文以大中型非球面确定性高效加工为出发点，对大中型非球面加工的铣磨阶段和抛光阶段的确定性高效加工方式进行研究。 作者结合国家工程任务需求和自身工作需要开展了大中型SiC非球面反射镜确定性高效加工的研究，论文主要完成的工作有： 1.超声复合磨削确定性高效加工的研究：分析了超声复合磨削的机理，从原理上证明超声复合磨削的高效性。对金刚石砂轮种类进行分析确定适合 SiC反射镜超声复合磨削三阶段加工的金刚石砂轮并进行设计。通过磨削实验确定超声复合磨削SiC材料的各项磨削工艺参数并进行优化，建立了超声复合磨削SiC材料工艺参数数据库。对超声主轴和刀柄进行分析，通过磨削工艺实验证明超声复合磨削的高效性。 2.大中型SiC非球面反射镜超声复合确定性磨削的研究：采用系数法和逆向工程法建立非球面高精度模型，根据模型进行加工仿真和刀轴路径规划。在SiC反射镜超声复合磨削加工的过程中利用激光跟踪仪进行在线检测，降低了风险,提高了磨削效率和磨削精度。对工程用Ф800mm SiC非球面反射镜进行超声复合确定性磨削并进行在线检测，磨削效率提高30%以上，磨削精度达到PV值11.2μm ，RMS值1.8μm。 3.磁介质辅助抛光的研究:设计完成了轮式磁介质辅助抛光模块并进行优化设计，可以直接应用于主轴为BT40锥柄的加工中心。对磁介质辅助抛光工艺参数进行优化，确定了改性Si磁介质辅助抛光的最优工艺参数。轮式磁介质辅助抛光对Φ150mm改性Si平面镜进行确定性抛光实验，最终结果达到PV0.107λ、RMS0.23λ（λ=0.6328μm）。磁介质辅助抛光的研究为磁流变抛光的研究打下良好的基础。 4.球形轮式磁流变抛光系统设计和机床设计分析:采用模块化设计理念设计完成了磁流变抛光系统的抛光机构模块和磁流变液循环模块，并对球形轮进行分析。确定了磁流变抛光对机床的性能参数要求，并根据要求对立式加工中心进行重新改造设计和分析。采用千分表找正的方法对球形磁流变抛光去除函数中心进行精密定标，提高了磁流变抛光的确定性。改造完成的立式磁流变数控抛光机床抛光口径Φ400mm的改性Si离轴凸非球面，经过一个周期12小时的磁流变抛光，非球面精度由抛光前的PV0.614λ、RMS0.099λ收敛至 PV0.201λ、RMS0.025λ。 本文的研究工作提高了大中型SiC非球面反射镜磨削加工效率和非球面磨削精度，减少了后续研磨加工的时间；磁流变抛光的高确定性使改性后的大中型SiC非球面反射镜的抛光效率有了明显提高。 |
| 英文摘要 | Medium and large aspheric mirrors are widely used for the investigation of optical system in both ground telescope optical system and space optics. With the increasing of demands, the processing need be done efficiently and fast, not limited by the processing could be done. In the paper, we studied the efficient and certain processing method to aspherical mirrors in both grinding and polishing periods, based on the processing to the aspherical mirrors in medium or large size. Combining the national engineering task requirements with my own work, we studied the efficient and certain processing method to SiC aspherical mirrors in medium or large size. 1. Research on the ultrasonic grinding deterministic efficient processing: the mechanism of ultrasonic grinding was analyzed, which proved the ultrasonic grinding was efficient. The diamond grinding wheels were analyzed and designed to determine the types of diamond grinding wheel for SiC mirror ultrasonic grinding of the three stages. The parameters of grinding process of SiC material ultrasonic grinding and optimization were determined through the grinding experiments. The process parameters database of ultrasonic grinding SiC material was established. The ultrasonic spindle and handle were analyzed; the efficiency of ultrasonic grinding was demonstrated by grinding process experiments. 2. Study of ultrasonic combined deterministic grinding of large and medium SiC aspheric mirrors: coefficient method and reverse engineering method were adopted to establish the precise aspherical model. Simulation and cutter path planning were carried out according to the model. Online detection based on laser tracker in the process of ultrasonic grinding SiC mirror, not only reduced risk, but improved grinding efficiency and accuracy. Combined with engineering examples, a SiC aspherical mirror with the aperture of 800mm had been manufactured by ultrasonic composite deterministic grinding and online testing, and the grinding efficiency had been improved more than 30%. After grinding, the surface error was PV 11.2μm and RMS 1.8μm. 3. Study of magnetic media assisted polishing: the design of wheel type magnetic media assisted polishing module had been completed and optimized; it could be applied to the spindle for machining center BT40 taper shank directly. The process parameters of magnetic media assisted polishing were optimized, the optimum process parameters of magnetic media assisted polishing for coated SiC mirror were determined. For example, a Φ150 mm coated SiC flat mirror had been fabricated by magnetic media assisted polishing, the final result reaches PV:0.107λ and RMS:0.23λ（λ=0.6328μm）. Research on the magnetic media assisted polishing laid a good foundation for the research of Magnetorheological Finishing (MRF). 4. The spherical wheel MRF system design and the analysis of machine tool design: with the help of the modular design concept, the polishing mechanism module and magnetorheological fluid circulation module of the MRF system were completed, and the spherical wheel was analyzed. The requirements for the performance of the machine tool parameters of MRF were determined. the vertical machining center was designed, reconstructed and analyzed according to the requirements. The precise position of spherical MRF removal function center was found by using a dial indicator alignment method, which improved the certainty of MRF. Combined with engineering examples, a Φ400 mm convex off-axis aspheric coated SiC mirror had been finished by IBF, after finishing a cycle of 12 hours, the surface error had been converged from PV:0.614λ, RMS:0.099λ to PV:0.201λ, RMS:0.025λ. The research work in this paper improved grinding efficiency and accuracy of the large and medium SiC aspheric mirror. It reduced the subsequent grinding time. High deterministic MRF improved efficiency of polishing large and medium coated SiC aspherical mirror obviously. |
| 公开日期 | 2015-12-24 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/48942]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | 殷龙海. 大中型SiC非球面反射镜确定性高效加工工艺的研究[D]. 中国科学院大学. 2015. |
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