QQ客服 官方微博 反馈留言

题名	大尺寸光栅刻槽误差校正及在线监测技术研究
作者	杨超
学位类别	博士
答辩日期	2015-05
授予单位	中国科学院大学
导师	唐玉国
关键词	刻划光栅 光栅刻槽误差 快速傅里叶变换 光栅基底面形误差 实时监测
其他题名	Research on correcting of the grating groove error in large area and real-time montoring technology
学位专业	光学工程
中文摘要	大尺寸高精度光栅尤其是高分辨率的中阶梯光栅成为光谱技术领域关注的新热点，在军事、天文、航天航空、核能以及各类民用领域的需求逐步提升。目前对于低刻槽密度的红外激光光栅和所有中阶梯光栅而言，由于光栅衍射效率较高以及对光栅刻槽的特殊要求，一般均采用机械刻划法制作。光栅刻划机在机械结构上主要由分度系统和刻划系统组成。上述的两个系统本身存在的误差将导致光栅产生刻槽误差，从而严重影响光栅光谱性能。鉴于此，本论文在国家重大科研装备研制项目及国家973项目资助下，从光栅的刻槽误差入手，探索提高大尺寸机械刻划光栅质量的方法。第一，采用菲涅耳-基尔霍夫衍射理论建立了存在刻槽位置误差及刻槽弯曲误差时的光栅衍射谱成像的数学模型，并分析上述误差对光栅光谱性能的影响。分析结果表明，光栅子午方向的光谱性能主要取决于光栅刻槽位置误差，光栅刻槽弯曲误差对其影响较小，该结果可为机械刻划光栅制作技术的研究重点提供理论指导。第二，通过对光栅刻划系统的驱动结构进行优化分析，最终将光栅刻划系统的驱动结构由双推拉杆修正为单推拉结构，从而减小了由于驱动结构引起的侧向力对石英导轨面形的影响；第三，根据杠杆原理，针对刻划刀架系统运行不稳定问题进行分析，设计了刻划刀架系统的机械改进方案，即采用双侧柔性铰链式结构代替原有的鞍型滑块与刻划刀架的固定连接方式，最后进行刻划刀架系统运行稳定性测试和光栅刻划实验，实验与理论分析结果在趋势上具有较好的一致性。以上研究为提高机械刻划光栅质量提供了理论及技术保障。第四，采用Ansys、abaqus软件对刻划机工作台机械结构参数与工作台摆角性能关系进行机械仿真及优化分析，设计了一套具有摆角校正能力的双压电驱动器校正工作台，并针对该结构设计了摆角误差实时测量光路，通过光栅模拟刻划实验验证了本文提出的摆角误差校正的可行性；实验结果表明，双压电驱动器校正光栅刻划机工作台摆角误差，可以有效抑制光栅刻槽摆角误差，提高光栅刻划质量。第五，建立光栅基底面形误差补偿的数学模型，采用光栅刻槽主动控制技术，根据预先设定的光栅基底面形误差的补偿模型实时校正光栅基底面形误差，从而提高光栅波前质量。第六，依据衍射光栅光谱成像理论，得到利用波前误差求解衍射谱分布的归一化计算式，以瑞利判据为基础提出了一种实时监测光栅分辨本领的方法，并基于工作台误差校正前后状态进行光栅刻划实验，实验结果证明了光栅光谱性能实时监测方法的可行性，该设计方法将光栅刻划质量实时监测引入到光栅刻划机系统中，从而可明显提高光栅刻划机的刻划效率。
英文摘要	For a large-area and high-quality plane diffraction grating, especially an echelle which has become a new hot spot in spectrograph field, and it is very popular for military, astronomy, defense, and civilian applications. Because of deep grooves with strict shapes, echelles and infrared-laser gratings are still produced by mechanical ruling. The grating ruling machine major components are the ruling system and the feeding system, and the errors of above system impact on the grating groove directly, at the same time it will influence the grating spectrum performance. In this case, the manuscript which is funded by National R&D Projects for Key Scientific Instruments and 973 project, that is focused on the grating groove errors and explore the method to improve the grating quality with large areas. Firstly, we use Fresnel - Kirchhoff diffraction theory to establish an imaging mode when the grating have groove position error and groove curve error, at the same time analyses the influence of the spectral properties with above errors. The result shows that the groove curve error and groove position error predominately influence grating sagittal and meridional spectral performance separately. These theories and research findings provide a theoretical direction of grating fabrication technology. Secondly, analyzing and optimizing the drive structure of ruling system, and in order to reduce the deformation of quartz surface, we choosing single rod to replace the double rod. Thirdly, according to lever principle, we analyses the unstable problem of the ruling carriage system, and design an improvement program of the ruling carriage system, which is using bilateral flexible hinge structure instead of the fixed link way between the saddle slider and the ruling carriage system. Then we carry out the experiments which are moving stability and ruling grating and the results show that these theories and research findings provide a theoretical and technical support for improving the quality of the grating ruling machine. Fourthly, using Ansys and abaqus software to optimize the relation between the configuration parameter of the grating ruling machine and the yaw error of the grating blank carriage, in this case we designed a structure with double piezoelectric devices to correct the yaw error. At the same time, to evaluate the correcting ability of the structure, we propose relative optical testing structure to verify the correcting accuracy by experiments. The experiment result shows that our method can accomplish the correction of yaw error in real-time effectively, at the same time it can improve the grating quality. Fifthly, establishing a mathematics model to compensate the grating blank error, and using active control technology to achieve error correction in real time. In this case we also can improve the grating quality. Sixth, basing on the imaging theory of grating spectrum, we get the computational formula of the diffraction spectrum distribution and provided a method basing on Rayleigh criterion to monitor the grating resolution in real time. Carry out the experiment to rule two gratings with and without errors correction by the real-time monitoring system respectively, the experimental turns out the feasibility of the real-time monitoring system. The method introduces the grating quality to the real-time monitoring system, in order to improve the ruling efficiency.
公开日期	2015-12-24
内容类型	学位论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/48936]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	杨超. 大尺寸光栅刻槽误差校正及在线监测技术研究[D]. 中国科学院大学. 2015.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。