| 题名 | 大光栅刻划机刻划系统结构设计与刻线弯曲误差机械修正 |
| 作者 | 宋楠 |
| 学位类别 | 博士 |
| 答辩日期 | 2015-05 |
| 授予单位 | 中国科学院大学 |
| 导师 | 唐玉国 |
| 关键词 | 大光栅刻划机 刻划系统 光栅刻线弯曲误差 机械修正方法 气浮导轨 |
| 其他题名 | The Design of the Ruling System of the Large Diffraction Grating Ruling Engine and the Mechanical Correction of Grating-line Curve Error |
| 学位专业 | 光学工程 |
| 中文摘要 | 衍射光栅是一种极为重要的色散元件，大面积高精度的平面衍射光栅在军事、天文、核能、航天航空及民用领域的应用十分广泛。衍射光栅的主要制造方法有机械刻划法和全息刻蚀法两种，其中对于某些特殊光栅如低刻线密度的红外激光光栅和所有中阶梯光栅等由于其刻线较深且对槽形要求非常严格，必须采用机械刻划法制造。光栅刻划是一种极为精密的技术，光栅刻划机被誉为“精密机械之王”。本论文受“十一五”国家重大科研装备研制项目资助，进行大型高精度衍射光栅刻划机（以下简称大光栅刻划机）刻划系统结构的设计工作，探索降低机械刻划光栅刻线弯曲误差，提高大面积机械刻划光栅质量的方法，对刻划系统各部分的误差进行了理论分析与实验验证，根据实验结果对刻划系统的结构进行改进，并进行了大面积光栅的刻划实验。首先介绍了光栅刻划机的结构组成及基本工作原理，分析了光栅刻划机的误差来源，介绍了刻线弯曲误差的检测方法并进行了大光栅刻划机的误差分配。第二，设计刻划系统石英导轨方案；确定导向导轨的结构形式并对其进行静力学分析，计算其工作状态下的变形对光栅刻线的影响；设计具备抬落刀、各方向自由度调整及在线换刃功能的金刚石刻刀刀架结构并分析其误差；驱动机构采用等速凸轮推动上下两级推杆的形式，通过改变其放大比可实现不同刻线长度，优化计算等速凸轮的轮廓曲线并进行了驱动机构的受力分析。第三，分析刻划系统工作过程中造成光栅刻线弯曲误差的各项因素，进行分段检测并提出机械修正方案；针对等速凸轮驱动下出现的换向冲击问题，设计用于间歇刻划模式下的非等速驱动机构即非等速凸轮/曲柄连杆驱动机构降低该影响，在模拟光栅刻划实验中发现刻划刀架受摩擦力影响出现爬行现象，导致刀架振动的谱密度增加，不利于进行闭环控制。第四，为消除爬行现象，使用气浮导轨取代石英导轨；介绍了气浮导轨的基本工作原理，根据光栅刻划要求及大光栅刻划机整体结构限制确定了气浮导轨的结构形式，并设计了兼顾稳定性与可调节性的支撑结构，采用双气浮导轨并联的形式以提高气浮导轨的刚度；对气浮导轨结构尺寸参数进行了优化计算并对其导向面的变形进行了有限元分析；根据气浮导轨的主要工作参数即承载力及刚度的要求计算了其节流孔的排布。第五，严格控制气浮导轨装配中的各种误差以提高其精度；分析并检测了动导轨运动中的偏转、气浮导轨振动情况以及空气扰动等因素对光栅刻划的影响并进行修正。第六，对光栅刻线误差进行补偿使其刻线误差能够满足误差分配要求。进行400mm×500mm大面积中阶梯光栅刻划实验，其实时监测数据显示刻线弯曲的重复性误差RMS值不大于2.9nm，光栅初始段杂散光仅为0.02%，整体杂散光强度满足研制目标要求。 |
| 英文摘要 | Diffraction grating is an extremely important optics dispersive element. The large area and high-precision plane diffraction grating is widely used in the military, astronomy, nuclear, aerospace and civilian areas. There are two main manufacturing methods of diffraction grating: mechanical ruling method and holographic etching method. Some certain gratings such as low groove-density grating for infrared laser and all echlle gratings must be manufactured by mechanical ruling, as their grooves are deep and the shape of grooves are strictly restricted. The grating ruling is an extremely sophisticated technology, and the grating ruling engine is so called "the king of the fine mechanics". This paper, which is funded by the National Key Technologies R&D Program for the 11th Five-year Plan and National R&D Projects for Key Scientific Instruments, is mainly focused on the structure design of the ruling system of the large-scale high-precision diffraction grating ruling engine(hereinafter referred to as the large grating ruling engine), with the discipline of reducing the mechanical ruling error of gratings and thus to improve the quality of large-scale machinery ruled gratings. This paper analyses the mechanical error of each part of the ruling system and improve the structure according to the results of experimental verification. A large area echelle grating was manufactured through the improved structure. Firstly, the basic structure, working principle and the error sources of grating ruling engine were introduced. The detection method of grating-line curve error was described and the error distribution of large grating ruling engine was made. Secondly, the quartz rail scheme ruling system was designed. The structure of quartz rail and ruling tools system was determined and its deformation was calculated by static analysis. The adjustable diamond turret was designed and its error was analyzed. The driving mechanism was designed as two equal and opposite velocity constant speed cam operating synchronously, in order to offset the impact of inertia force on the ruling process. This part also optimized the profile curve of cam and conducted a stress analysis of the drive mechanism. Thirdly, the factors causing grating-line curve error was segmented analyzed and detected, with mechanical correction methods proposed. In order to reduce the impact of commutation on the grating ruling, non-constant speed cam and crank link was applied instead of the former constant speed cam. It was found that the ruling tools system creeping during the simulation grating ruling experiment, affected by friction, which lead to increasing vibration spectral density, is not conducive to closed-loop control. Fourthly, using aerostatic guide to replace the original quartz guide to eliminate the creeping phenomenon.The aerostatic guide's basic operating principle was presented and its structure was determined according to the request of grating ruling and the restrict of overall grating ruling engine. A double aerostatic guidein parallel form was adopted for better stiffness and its support structure taking the stability and adjustability into account. The structure and capability parameters was also optimized. Fifthly, control the various error during the assembly of the aerostatic guide strictly in order to improve its accuracy. Analyzed and detected the errors that affect the grating ruling such as the roll of slider, the vibration of aerostatic guide and the air turbulence，with the solutions proposed. Sixthly, the grating-line curve error was compensated to meet the requirements of error distribution. A 400mm×500mm echelle grating was manufactured by this system. The real-time monitoring data shows that the RMS of the grating-line curve error repeatability is no more than 2.9nm. The testing results showed that the overall echelle grating's stray light intensity meets the target requierments, especially the initial part could reach 0.02%. |
| 公开日期 | 2015-12-24 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/48891]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | 宋楠. 大光栅刻划机刻划系统结构设计与刻线弯曲误差机械修正[D]. 中国科学院大学. 2015. |
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