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题名	平面变栅距全息光栅设计方法与制作技术研究
作者	姜岩秀
学位类别	博士
答辩日期	2015-05
授予单位	中国科学院大学
导师	巴音贺希格
关键词	平面变栅距全息光栅 球面波 优化设计算法 误差补偿 柱面波
其他题名	The Research on Design Methods and Fabricating Technologyof Varied Line-Space Holographic Plane Grating
学位专业	光学
中文摘要	平面变栅距光栅因为具有自聚焦、像差校正以及平焦场的特性，因此适用于极紫外和软X射线波段的高分辨能力的掠入射单色器。平面变栅距光栅的刻槽分布决定了其消像差能力，其相邻栅距变化量一般在纳米量级，制作难度较大，因此，本论文对球面波曝光系统下的平面变栅距全息光栅设计方法与制作技术做了一系列深入的研究。第一，通过对平面变栅距光栅的聚焦性能与刻槽函数的关系的分析，以及平面变栅距光栅的像差原理，提出了基于像差系数法的平面变栅距光栅刻槽函数设计方法，并对平面变栅距全息光栅的光谱分辨能力进行了分析。第二，将第一代球面波曝光系统推导的刻槽分布函数表达式转换为刻槽密度函数表达式，并以此建立单目标函数，提出了使用局部算法和全局算法相结合的改进的局部优化算法对球面波曝光系统下的平面变栅距全息光栅记录参数进行优化设计，分别使用常规的局部算法、遗传算法以及改进的局部算法对软X射线使用波段下的平面变栅距光栅记录参数进行了优化设计和对比分析，结果表明采用改进的局部算法设计的光栅刻槽密度符合程度，以及光谱分辨能力均高于常规算法设计的光栅，改进的局部算法更适用于球面波曝光系统下的平面变栅距光栅的记录参数设计。第三，对球面波曝光系统的记录参数误差引起的刻槽密度函数、聚焦曲线以及谱像宽度变化进行了分析，确定了对平面变栅距全息光栅成像质量影响较大的误差因素，并给出记录参数误差的相应补偿方法。第四，将球面波曝光系统记录参数的改进的局部优化算法以及误差补偿方法应用于极紫外波段光谱诊断仪器中的平面变栅距光栅的研制，并对设计结果进行刻槽密度以及光谱分辨能力分析；给出近似掠入射的曝光系统调试方法，并对制作的平面变栅距光栅的刻槽密度进行测量，测量结果表明制作的平面变栅距光栅刻槽密度函数分布以及光谱分辨能力能够达到与设计结果相近的水平，理论指导了平面变栅距全息光栅的研制。第五，分析了球面波曝光系统制作的平面变栅距光栅刻槽弯曲对刻槽密度以及光谱分辨能力的影响，光栅宽度越大，其光谱分辨能力越低，指出了球面波曝光系统在制作宽度较大光栅上的局限性；提出了使用柱面波曝光系统制作直刻槽的平面变栅距光栅的方法，分析并建立了柱面波曝光系统下的平面变栅距光栅刻槽函数的数学模型，设计了以柱面镜和狭缝为核心器件的柱面波曝光系统，为全息法制作直刻槽的平面变栅距光栅提供理论指导。
英文摘要	Varied line-space (VLS) plane grating has the ability of focusing, reducing aberration and flat field, which means that VLS plane gratings are well applied for monochromator of high resolution and grazing incidence in the soft X-ray and extreme ultraviolet (EUV) region. However, adjacent grating lattice spacing is at the nanoscale, the fabrication of VLS plane grating is extremely difficult. In this paper, the research is mostly focused on design methods and fabricating technologies of VLS holographic plane grating. Firstly, based on the relationship between the ability of focusing and grooving function, and the principle of aberration of VLS plane grating, the design method of grating groove function coefficient is proposed. The spectral resolution of VLS plane grating is also discussed. Secondly, single objective function is built based on the groove density function of the first generation spherical wave-front recording system, which is transformed from groove function. The improved local optimization algorithm which combines the advantages of local optimization algorithm and global optimization algorithm is proposed to be used in the optimization design of the recording parameters. The recording parameters of the VLS plane grating used in soft X-ray are calculated by three different optimization algorithm, the conventional local optimization algorithm, genetic optimization algorithm and the improved optimization algorithm. The analyses of the optimization results show that grating designed by the improved local optimization algorithm has better groove density and spectral resolution than the gratings design by the other two conventional optimization algorithm. The improved local optimization algorithm is more suitable in the spherical wave-front recording parameters design. Thirdly, considering fabrication of the VLS plane grating, studies the influence of the recording parameters error of spherical wave-front on grating groove density, focal curve and image width. Find out the main error affect the VLS plane grating imaging and propose the compensation method of the recording parameters error. Fourthly, the local optimization algorithm of the spherical wave-front recording parameters design and the compensation method of the recording parameters error are used in the design and fabrication of the VLS plane grating applied to an online grazing incidence spectrometer which covers the EUV region of 50 nm-150 nm. The groove density and spectral resolution of the designed VLS plane grating are analyzed. Based on the designed recording parameters, give the debugging method of the approximate grazing incidence recording system. The fabrication and test of the VLS plane grating are accomplished. The test results show that the groove density and spectral resolution of the fabricated VLS plane grating are similar with designed grating, which give guidelines for the design fabrication of the VLS holographic plane grating. Fifthly, analyzed the influence the groove curve of the VLS plane grating fabricated in the spherical wave-front recording system on the groove density and spectral resolution, the greater grating width, the lower spectral resolution. The VLS plane grating with greater width can’t be fabricated in the spherical wave-front recording system. Cylindrical wave-front recording system is put forward to fabricate straight groove VLS plane grating. Analyze and build the mathematical model of the groove density in the cylindrical wave-front recording system. Design the recording system used cylindrical mirror and slit as key component, provide theoretical guidance for the fabrication of straight groove VLS plane grating.
公开日期	2015-12-24
内容类型	学位论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/48850]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	姜岩秀. 平面变栅距全息光栅设计方法与制作技术研究[D]. 中国科学院大学. 2015.

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